Second-source spares for wafer lines.
Wafer processing, lithography, etching, deposition and transfer equipment, etc. — all parts custom-made to drawing.
Ceramic Wafer Boats (Wafer Carriers)
High-purity alumina wafer boats for diffusion and annealing furnaces.
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Cordierite Low Thermal Expansion Mirrors
Lightweight cordierite mirror blanks and structural plates for lithography and astronomical optics, where near-zero thermal expansion keeps geometry stable.
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ESD Ceramic Tweezers
Ceramic-tipped tweezers for electrostatic-sensitive wafer and device handling — no metal contact, no scratching, no discharge.
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Heat Dissipation Ceramic Substrates
Monolithic AlN and alumina substrates that move heat away from power devices without bonding layers — long-term reliability for power modules and LED.
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Ceramic Lamp Tubes
Translucent and opaque alumina tubes for lamp envelopes and IR heating elements, stable at high temperature with excellent electrical insulation.
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Ceramic Handling Arms
Rigid, lightweight wafer handling arms in alumina, SiC or Si3N4 — precision-ground mounting faces for fast, vibration-free transfer.
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Ceramic Heaters for Semiconductor Equipment
AlN and alumina heater plates with uniform temperature distribution and plasma-resistant surfaces for deposition and etch processes.
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Electrostatic Chucks (ESCs)
Alumina and AlN electrostatic chuck bodies with tightly controlled flatness and volume resistivity for stable wafer clamping in plasma environments.
View Details →Vacuum Chucks & Stage Parts
Porous and grooved ceramic vacuum chucks, integrated stage mirrors and stage structural parts — high stiffness with sub-micron flatness options.
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Domes & Chamber Liners
Large alumina domes and chamber liners with uniform electrical properties and plasma resistance for etch and CVD equipment.
View Details →LCD / FPD Processing Equipment Parts
Large-format alumina plates, rails and arms for flat-panel processing equipment — high stiffness, low reflection black finishes available.
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Dressing Plates for Polishing Pads
Grooved ceramic dressing plates that condition CMP polishing pads — consistent groove geometry for stable removal rates.
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Anti-Plasma Ceramic Parts
High-purity alumina and yttria-coated parts for aggressive plasma chambers — low particle generation and low dielectric loss.
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SiC Polishing Plates
Silicon carbide polishing and lapping plates with high Young's modulus and low thermal expansion — flat reference surfaces that stay flat.
View Details →Ceramic Polishing Plates
Alumina and SiC polishing plates for wafer, glass and metal lapping — hard, wear-resistant surfaces ground to tight flatness.
View Details →Handling Arms & End Effectors
Wafer end effectors and robot blades with precision-ground pocket geometry, in alumina, SiC or transparent sapphire on request.
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Chamber & Viewport Windows
Ultra-pure sapphire and alumina viewports for plasma chambers — optically clear, heat resistant and plasma resistant.
View Details →Carrier Plates for GaAs Wafers
Heat-resistant carrier plates for GaAs and compound semiconductor wafers, with pocket machining to your wafer geometry.
View Details →Wafer Boats
Alumina and SiC wafer boats for furnace loading — slotted carriers machined to your wafer size and pitch.
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Lift Pins
Precision ceramic lift pins with polished wafer-contact tips — concentricity and tip radius controlled to drawing.
View Details →Plasma Generation & Introduction Tubes
Alumina and sapphire tubes for plasma generation, gas introduction and microwave coupling — superior plasma resistance and low dielectric loss.
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Multi-Pin Feedthroughs
Ceramic-to-metal sealed multi-pin feedthroughs built on proven alumina metallization technology — airtight signal and power pass-throughs for vacuum systems.
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Coaxial Feedthroughs
Coaxial ceramic feedthroughs for vacuum and high-voltage applications, from radiation light sources to industrial equipment.
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Ceramic Isolator Flanges
Ceramic break isolator flanges that electrically separate vacuum line sections — used in advanced laboratories and beamline facilities.
View Details →Ceramic Feedthroughs
Highly reliable hermetic feedthroughs — proven components across analytical, medical, semiconductor and industrial vacuum equipment.
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Optical Windows with Vacuum Flange
Sapphire or alumina windows vacuum-tight bonded into metal flanges — materials and bonding technology combined for outstanding viewport performance.
View Details →Hermetic Subminiature D Feedthroughs
Subminiature D-type ceramic feedthroughs with excellent hermeticity for ultra-high-vacuum applications.
View Details →Special Brazed Feedthroughs
Feedthroughs brazed with aluminum or non-magnetic metals for special thermal and magnetic requirements.
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Vacuum Interrupter Ceramic Tubes
Metallized alumina insulator tubes for vacuum interrupters in medium-voltage switchgear (approx.
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